How it works

• Two Microlens Köhler Integrators (Fly’s Eye Condensers) homogenize and decouple the illumination light from displacement and tilt of the light source.
• Optical design is optimized for telecentric error correction in mask illumination light.
• Illumination Filter Plate (IFP) located at 2nd Köhler Integrator defines the angular spectrum of illumination light.