At a glance

• Exchangeable Illumination Filter Plates (IFP) allow for a quick and easy changeover between different angular settings thereby enabling highest process flexibilty.
• Swith in less than a minute from standard SUSS Optics like HR (High Resolution) or LGO (Large Gap Optics) to Quadrupole or Malteser-Illumination.
• Stabilize critical lithography steps and enlarge your process window.